In the field of semiconductor manufacturing, Intel is accelerating its technological leadership in chip manufacturing by actively promoting high numerical aperture extreme ultraviolet (high numerical aperture extreme ultraviolet) lithography technology. According to the latest news, Intel has installed and used two ASML Twinscan EXE:5000 high-numerical hole EUV lithography machines at its D1 development facility in Hillsboro, Oregon, and has successfully processed up to 30,000 wafers in just one quarter. This progress not only demonstrates Intel's boldness and determination in the application of new technologies, but also lays a solid foundation for the future development of high-value pore extreme ultraviolet technology.
The core advantages of high-value porous extreme ultraviolet technology
High numerical hole extreme ultraviolet lithography is a cutting-edge technology in the field of semiconductor manufacturing, and its biggest advantage is that it significantly improves lithography resolution and production efficiency. Compared to existing low-NA EUV tools, the high NA EUV is able to increase the resolution of a single exposure from 13.5 nm to 8 nm, while increasing transistor density by a factor of 2.9. In addition, the high-bore EUV technology reduces the number of exposures and processing steps, which significantly reduces production time and costs.
For example, while the traditional Low-NA EUV process requires three exposures and approximately 40 processing steps, the high-bore EUV technology requires only one exposure and less than 10 processing steps. This increase in efficiency is critical to the high-density and high-performance needs of semiconductor manufacturing in the future.
Intel's strategic layout and technological breakthroughs
Intel has shown a clear preemptive strategy in the adoption of high-bore EUV technology, which stands in stark contrast to TSMC's relatively cautious approach. Intel plans to fully apply high-value hole extreme ultraviolet technology in the future 14A (1.4nm level) chip manufacturing, and although the specific mass production time has not yet been clarified, early R&D and testing have accumulated significant technical advantages for it.
In addition, Intel worked closely with ASML to provide feedback on the development of the Twinscan EXE:5000 to further optimize the reliability and performance of the device. Early tests have shown that the approximately $380 million high-precision lithography machine is twice as reliable as the previous generation of EUV equipment. This not only provides technical support for Intel's future mass production of 14A nodes, but also sets a new technical standard for the entire industry.

Figure: Intel's high numerical aperture EUV tool, which has successfully processed 30,000 wafers
Profound impact on the industry
Intel's active deployment in high-value hole extreme ultraviolet technology is not only for its own technological breakthrough, but also for the far-reaching impact on the entire semiconductor industry. By being the first to master and apply this technology, Intel is expected to break TSMC's dominance in the field of advanced processes. For example, Intel's 18A process has demonstrated significant performance advantages over TSMC's 2nm process. With the gradual maturity of high-value hole extreme ultraviolet technology, Intel is expected to achieve more powerful chip manufacturing capabilities in areas such as high-performance computing, data centers, and artificial intelligence.
In addition, the promotion of high-value pore extreme ultraviolet (EUV) technology will also drive the development of related industrial chains, including innovations in the fields of mask glass, thin films and chemical materials. Intel's early adoption opened up the possibility of standardizing these technologies, while also paving the way for other chipmakers to follow.
Future outlook: Intel-TSMC competition
In the future semiconductor competition, the technical routes of Intel and TSMC will directly affect the market structure. Intel's 14A node and TSMC's 2nm process will both enter mass production around 2025, and this technology race will be an important turning point in the semiconductor industry. Intel's high-bore extreme ultraviolet (VW) technology will greatly enhance its competitiveness in the field of advanced processes if it can be successfully mass-produced and recognized by the market.
However, TSMC is still not to be underestimated with its mature experience in low-NA EUV technology and its deep foundation in chip manufacturing. Its high density and energy efficiency advantages in the 2nm process, as well as its leadership in mobile and AI chip manufacturing, make this competition uncertain.
Conclusion
Intel's active investment and early application in high-value hole extreme ultraviolet technology not only laid a solid foundation for its future 14A chip manufacturing, but also showed its ambitions in the field of semiconductor manufacturing. With the gradual maturity of technology and the advancement of market applications, high numerical aperture extreme ultraviolet (EUV) will become a key driving force for the development of the semiconductor industry in the future. It remains to be seen whether Intel can achieve real industry disruption with this technology, but it is certain that the popularization of high-value hole extreme ultraviolet technology will bring new development opportunities and challenges to the semiconductor industry.
